Microelectromechanical systems (MEMS)-based vacuum sensing technologies have transformed the measurement of low pressures by leveraging microscale fabrication techniques to yield compact, low-power ...

A novel, quantum-based vacuum gauge system invented by researchers at the National Institute of Standards and Technology (NIST) has passed its first test to be a true primary standard—that is, ...

A research team led by Profs. Chen Deyong and Wang Junbo from the Aerospace Information Research Institute (AIR) of the Chinese Academy of Sciences has developed a novel microsensor that enhances both ...

There’s no such thing as a complete vacuum. Even in the cosmic void between galaxies, there’s an estimated density of about one hydrogen or helium atom per cubic meter. But these estimates are largely ...